Electron Probe X-Ray Microanalysis (EPMA)
Electron Probe X-Ray Microanalysis (EPMA) provides a means for obtaining qualitative and quantitative elemental microanalysis within regions as small as a few cubic micrometers.
All elements in the periodic table except hydrogen, helium and lithium can be detected. Detection limits for elements in the mid range of the periodic table: ~500-1000ppm. Detection limits are somewhat poorer for elements at either end of the periodic table.
The Electron Probe X-Ray Microanalyzer at Micron Inc. is computer controlled and equipped with both Energy Dispersive and Wavelength Dispersive X-Ray Spectrometers, thus assuring clients of obtaining cost effective analysis.
Modes of Analysis:
- Survey Scan – Quantitative identification of all elements within the area of interest.
- Elemental Distribution Images – Photographic images depicting variations in elemental concentration as variations in gray level of the image, brightest areas corresponding to areas of highest concentration.
- Elemental Concentration Profiles – Graphical presentation depicting variations in elemental concentration along a given line of the sample.
- Quantitative Elemental Analysis – Raw data are corrected for background, absorption, fluorescence and atomic number effects to produce quantitative results with accuracy of two to three percent relative to the amount present.