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Auger Electron Spectroscopy (AES)
Auger Electron Spectroscopy (AES) is an analytical method for characterizing the surface (25-50 angstroms) chemistry of materials.
Range of Detectable Elements: All except Hydrogen and Helium
Detection Limits: Few atom percent
Area Sampled: Sub micrometer to several millimeters
Depth of Analysis: 25-50 angstroms
Modes of Analysis:
- Survey Scan – Qualitative identification of elements present within the excited volume.
- Elemental Mapping – Photographic images depicting variations in elemental concentration as variations in gray level of the image.
- Concentration Depth Profiles – The ability to perform in situ argon ion etching provides a means for characterizing the elemental composition as a function of depth in the sample. Sensitivity factors are applied to the raw data to yield atomic concentrations.